Heterodyne standing-wave interferometer / Heterodynes Stehende-Welle-Interferometer
نویسندگان
چکیده
منابع مشابه
Standing-wave interferometer
An interferometric position sensor was developed using the concept of sampling a standing wave. Interference of a standing wave created in front of a plane mirror can be detected by thin, partly transparent sensors based on amorphous silicon. The optical thickness of the absorption layer is thinner than the wavelength l of the incident light. Detection of minima and maxima of the standing wave ...
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ژورنال
عنوان ژورنال: tm - Technisches Messen
سال: 2018
ISSN: 2196-7113,0171-8096
DOI: 10.1515/teme-2018-0017